40 CFR Part 98, Table I-11
Verified against eCFR.gov as of June 20, 2026View official text on eCFR.gov ↗
| All processes | Process gas i |
|---|---|
| CF4 | C2 F6 | CHF3 | CH2 F2 | C2 HF5 | CH3 F | C3 F8 | C4 F8 | NF3 | NF3 Remote | SF6 | C4 F6 | C5 F8 | C4 F8 O |
| 1-Ui | 0.79 | 0.55 | 0.51 | 0.13 | 0.064 | 0.7 | 0.4 | 0.12 | 0.18 | 0.028 | 0.58 | 0.083 | 0.072 | 0.14 |
| BCF4 | NA | 0.19 | 0.085 | 0.079 | 0.077 | NA | 0.2 | 0.11 | 0.11 | 0.015 | 0.13 | 0.095 | NA | 0.13 |
| BC2 F6 | 0.027 | NA | 0.035 | 0.025 | 0.024 | 0.0034 | NA | 0.019 | 0.0059 | NA | 0.1 | 0.073 | 0.014 | 0.045 |
| BC4 F8 | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA |
| BC3 F8 | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA | NA |
| BC5 F8 | 0.00077 | NA | 0.0012 | NA | NA | NA | NA | 0.0043 | NA | NA | NA | NA | NA | NA |
| BCHF3 | 0.06 | 0.002 | NA | 0.049 | NA | NA | NA | 0.02 | NA | NA | 0.0011 | 0.066 | 0.0039 | NA |
| BF2 | NA | NA | NA | NA | NA | NA | NA | NA | NA | 0.5 | NA | NA | NA | NA |
Notes: NA = Not applicable; i.e., there are no applicable emission factor measurements for this gas. This does not necessarily imply that a particular gas is not used in or emitted from a particular process sub-type or process type.
[89 FR 31921, Apr. 25, 2024]